Engineer's Office for Applied Spectroscopy


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Film Thickness Measurement

Method Principles
  Schematic Gauge Setup
  Example: Lacquer  Coatings
  Example: Vapor Deposition
  Example: Webcoater


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Film Thickness Measurement on Vapor Deposition Layers

The high precise technology of our  thickness gauges determine the film thickness of even sub-micron structures, for instance, of Vapor Deposition Layers (like Parylene) or Photo Resist Coatings.

3D film thickness profile of a diamond layer on silicon

The picture shows a 3D film thickness profile of a 10 mm˛ diamond layer on silicon in the thickness range of 0,8-1 microns. Each color maps a thickness range of only 12 nanometer. Note the microstructures on the plateau of the diamond layer!