Applications
Film Thickness Measurement
Method Principles
Schematic Gauge Setup
Example: Lacquer Coatings
Example: Vapor Deposition
Example: Webcoater
The high precise technology of our thickness
gauges determine the film thickness of even sub-micron structures, for instance, of
Vapor Deposition Layers (like Parylene) or Photo Resist
Coatings.
The picture shows a 3D film thickness profile of a 10 mm˛ diamond layer on silicon in the
thickness range of 800-1000 nanometer. Each color maps a thickness range of only 12 nanometer.
Note the microstructures on the plateau of the diamond layer!