Ingenieurbüro für Angewandte Spektrometrie

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FTM-Micro Film Thickness Microscope

The FTM-Micro film thickness gauge uses the same white-light interference phenomenon for non-contact film thickness measurement of transparent layers as our TranSpec and FTM-Lite instruments. In order to determine the thickness on very small spots, however, the FTM-Micro instrument uses a fiber optics coupled microscope with live camera view.

The fiber optics coupled microscope reduces the film thickness measurement spot size down to approximately 50-100 micrometers, depending on the selected magnification. The measurement spot image is viewed in real-time by a special color camera assembled to the microscope.
 


FTM-Micro Film Thickness Microscope

FTM-Micro Film Thickness Microscope
connected to a TranSpec process spectrometer