Applications
Plasma Emission Measurement
Schematic Gauge Setup
The plasma emission is
observed inside the chamber by use of a special flexible vacuum fiber optics
cable, which is
connected thru a flange with another regular fiber light guide outside the
chamber towards our TranSpec Spectrometer.
Note that, due to the use of these flexible vacuum fiber optics, the plasma emission can be
observed at different positions inside the chamber!
The picture right beside shows a vacuum fiber feed-thru with a KF-50 flange and two FSMA adapters
in order to connect a vacuum fiber inside and a regular fiber outside the
chamber.
