Products
FTM-Lite Film Thickness Gauges
FTM-Micro Thickness Microscope
TranSpec Spectrometer
Spectrometer Modules
The TranSpec spectrometers exclusively use Carl Zeiss spectrometer modules. With
these modules, the entrance slit is imaged on a photodiode array by means of a
holographically created concave diffraction grating. All components of the spectrometer
module are firmly mounted in one unit and permanently adjusted to each other, which means
that there are no mechanically moveable parts! Note also that there is no
wavelength calibration required during the entire lifetime!
MC
Spectrometer Modules with 512 or 1024 diodes
The MC spectrometer
modules are used especially for high resolution spectrometry measuring tasks, such as for
the plasma emission measurement, but also for film thickness measurement.
Module
MC-UV
MC-VIS
MC-NIR
MC-NIR-2
MC-UV/NIR
Spectral Range [nm]
200-620
360-780
600-1020
680-1100
200-1040
Diodes
512
512
512
512
1024
Resolution [nm/diode]
0.8
0.8
0.8
0.8
MS
Spectrometer Modules with 256 diodes
The MS spectrometer
modules have a photodiode array with 256 pixel. These modules are used specially for
high-speed measurement tasks, for which the spectroscopic resolution is not that
important.
Module
MS-UV
MS-UV/VIS
MS-VIS
Spectral
Range [nm]
200-740
300-1140
Diodes
256
256
256
Resolution [nm/diode]
2.1
3.3